XPS study of diamond-like carbon-based nanocomposite films

S. Zhang; Y. Q. Fu; X. L. Bui; H. J. Du

doi:10.1142/S0219581X04002693

XPS study of diamond-like carbon-based nanocomposite films

S. Zhang^*
, Y. Q. Fu
, X. L. Bui
, H. J. Du

^*Corresponding author for this work

Nanyang Technological University
Singapore-MIT Alliance

Research output: Contribution to journal › Article › peer-review

40 Scopus citations

Abstract

X-ray photoelectron spectroscopy (XPS) analysis of amorphous carbon (a-C)-based nanocomposite films has been carried out. Four bonding types of carbon are revealed from the C 1s spectra: C-C sp ² and sp ³ bonding, C-O and C-Ti bonding. With the introduction of Ti and Al into the a-C matrix, the carbon sp ³/sp ² ratio decreases significantly. XPS results also confirm that the Al doped in the film basically exists as an elemental Al in the a-C matrix, and the titanium is mostly bonded with carbon to form nc-TiC.

Original language	English
Pages (from-to)	797-802
Number of pages	6
Journal	International Journal of Nanoscience
Volume	3
Issue number	6
DOIs	https://doi.org/10.1142/S0219581X04002693
State	Published - Dec 2004
Externally published	Yes

Keywords

Diamond-like carbon
Nanocomposite
Sputtering
XPS

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10.1142/S0219581X04002693

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title = "XPS study of diamond-like carbon-based nanocomposite films",

abstract = "X-ray photoelectron spectroscopy (XPS) analysis of amorphous carbon (a-C)-based nanocomposite films has been carried out. Four bonding types of carbon are revealed from the C 1s spectra: C-C sp 2 and sp 3 bonding, C-O and C-Ti bonding. With the introduction of Ti and Al into the a-C matrix, the carbon sp 3/sp 2 ratio decreases significantly. XPS results also confirm that the Al doped in the film basically exists as an elemental Al in the a-C matrix, and the titanium is mostly bonded with carbon to form nc-TiC.",

keywords = "Diamond-like carbon, Nanocomposite, Sputtering, XPS",

author = "S. Zhang and Fu, \{Y. Q.\} and Bui, \{X. L.\} and Du, \{H. J.\}",

year = "2004",

month = dec,

doi = "10.1142/S0219581X04002693",

language = "英语",

volume = "3",

pages = "797--802",

journal = "International Journal of Nanoscience",

issn = "0219-581X",

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TY - JOUR

T1 - XPS study of diamond-like carbon-based nanocomposite films

AU - Zhang, S.

AU - Fu, Y. Q.

AU - Bui, X. L.

AU - Du, H. J.

PY - 2004/12

Y1 - 2004/12

N2 - X-ray photoelectron spectroscopy (XPS) analysis of amorphous carbon (a-C)-based nanocomposite films has been carried out. Four bonding types of carbon are revealed from the C 1s spectra: C-C sp 2 and sp 3 bonding, C-O and C-Ti bonding. With the introduction of Ti and Al into the a-C matrix, the carbon sp 3/sp 2 ratio decreases significantly. XPS results also confirm that the Al doped in the film basically exists as an elemental Al in the a-C matrix, and the titanium is mostly bonded with carbon to form nc-TiC.

AB - X-ray photoelectron spectroscopy (XPS) analysis of amorphous carbon (a-C)-based nanocomposite films has been carried out. Four bonding types of carbon are revealed from the C 1s spectra: C-C sp 2 and sp 3 bonding, C-O and C-Ti bonding. With the introduction of Ti and Al into the a-C matrix, the carbon sp 3/sp 2 ratio decreases significantly. XPS results also confirm that the Al doped in the film basically exists as an elemental Al in the a-C matrix, and the titanium is mostly bonded with carbon to form nc-TiC.

KW - Diamond-like carbon

KW - Nanocomposite

KW - Sputtering

KW - XPS

UR - https://www.scopus.com/pages/publications/21144449207

U2 - 10.1142/S0219581X04002693

DO - 10.1142/S0219581X04002693

M3 - 文章

AN - SCOPUS:21144449207

SN - 0219-581X

VL - 3

SP - 797

EP - 802

JO - International Journal of Nanoscience

JF - International Journal of Nanoscience

IS - 6

ER -

XPS study of diamond-like carbon-based nanocomposite films

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Keywords

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