TY - GEN
T1 - Wide Range Bridge Type 3D Tactile Sensor with Variable Sensitivity through Replaceable Elastic Layer Attaching on PDMS Cap
AU - Hou, Cheng
AU - Wang, Kaiyao
AU - Lou, Liang
AU - Zhang, Songsong
AU - Liu, Huicong
AU - Sun, Lining
N1 - Publisher Copyright:
© 2021 IEEE.
PY - 2021/6/20
Y1 - 2021/6/20
N2 - This paper proposes a wide range 3 dimensional (3D) tactile sensor with variable sensitivity by using the robust bridge, array pyramid structure, and different Young's modulus and thickness of replaceable elastic layers on the assembled sensor's surface. In the structure of the sensor, the forces acting on the surface of the elastomer were transmitted to the bridges and silicon chip through the pyramids. Moreover, add one softer elastic layer on the surface of the PDMS cap, the hollow area will be compressed larger under the action of pressure since the hollow structure of the PDMS cap and different modulus between the elastic layer and PDMS cap. The sensitivities of this developed sensor increased three × compared to this sensor without an elastic layer in the measurement range of 100kPa (normal force).
AB - This paper proposes a wide range 3 dimensional (3D) tactile sensor with variable sensitivity by using the robust bridge, array pyramid structure, and different Young's modulus and thickness of replaceable elastic layers on the assembled sensor's surface. In the structure of the sensor, the forces acting on the surface of the elastomer were transmitted to the bridges and silicon chip through the pyramids. Moreover, add one softer elastic layer on the surface of the PDMS cap, the hollow area will be compressed larger under the action of pressure since the hollow structure of the PDMS cap and different modulus between the elastic layer and PDMS cap. The sensitivities of this developed sensor increased three × compared to this sensor without an elastic layer in the measurement range of 100kPa (normal force).
KW - 3D tactile sensor
KW - Piezoresistive bridge
KW - elastic layer
KW - pyramid structure
KW - variable sensitivity and wide range
UR - https://www.scopus.com/pages/publications/85114962611
U2 - 10.1109/Transducers50396.2021.9495728
DO - 10.1109/Transducers50396.2021.9495728
M3 - 会议稿件
AN - SCOPUS:85114962611
T3 - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
SP - 214
EP - 217
BT - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Y2 - 20 June 2021 through 25 June 2021
ER -