Abstract
The vibration simulation model of a transducer system in thermosonic wire bonding was established by finite element method and verified by electrical sine sweeping exciting experiment. The results show that, transducer system of wire bonder works with its second mode of axial vibration of concentrator and radial vibration of capillary. There are many other undesirable modes that may be excited because they are very close to working frequency. These undesirable modes would waste ultrasonic energy and badly influence on bonding quality between gold ball and substrate, so they should be well controlled in bonding. Good agreement between simulation and experimental results is obtained, where the computed error of working frequency is only 1.2%.
| Original language | English |
|---|---|
| Pages (from-to) | 1613-1617 |
| Number of pages | 5 |
| Journal | Zhongguo Jixie Gongcheng/China Mechanical Engineering |
| Volume | 17 |
| Issue number | 15 |
| State | Published - 10 Aug 2006 |
| Externally published | Yes |
Keywords
- FEM model
- Thermosonic wire bonding
- Transducer system
- Vibration characteristics
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