Vibration performance researching in the MEMS galvanometer of an imaging lidar system

Yang Qu; Chunhui Wang; Yajun Pang; Tiantian Tang

doi:10.3788/AOS201434.s111004

Vibration performance researching in the MEMS galvanometer of an imaging lidar system

Yang Qu^*
, Chunhui Wang
, Yajun Pang
, Tiantian Tang

^*Corresponding author for this work

School of Astronautics

Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

The micro electro mechanical system (MEMS) galvanometer of an imaging lidar system is analyzed, experiment measures the key elements of the vibration performance of MEMS: frequency and driving voltag. The results show that scanning in the frequency of 60~200 Hz and driving voltage belove 60 V can make wide angle scanning and satisfy the demand of 64~256 point per second.

Original language	English
Article number	s111004
Journal	Guangxue Xuebao/Acta Optica Sinica
Volume	34
DOIs	https://doi.org/10.3788/AOS201434.s111004
State	Published - 10 Sep 2014

Keywords

Angle
Frequency
Imaging lidar
Imaging systems
Micro electro mechnical system

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10.3788/AOS201434.s111004

Cite this

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abstract = "The micro electro mechanical system (MEMS) galvanometer of an imaging lidar system is analyzed, experiment measures the key elements of the vibration performance of MEMS: frequency and driving voltag. The results show that scanning in the frequency of 60\textasciitilde{}200 Hz and driving voltage belove 60 V can make wide angle scanning and satisfy the demand of 64\textasciitilde{}256 point per second.",

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AU - Wang, Chunhui

AU - Pang, Yajun

AU - Tang, Tiantian

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Y1 - 2014/9/10

N2 - The micro electro mechanical system (MEMS) galvanometer of an imaging lidar system is analyzed, experiment measures the key elements of the vibration performance of MEMS: frequency and driving voltag. The results show that scanning in the frequency of 60~200 Hz and driving voltage belove 60 V can make wide angle scanning and satisfy the demand of 64~256 point per second.

AB - The micro electro mechanical system (MEMS) galvanometer of an imaging lidar system is analyzed, experiment measures the key elements of the vibration performance of MEMS: frequency and driving voltag. The results show that scanning in the frequency of 60~200 Hz and driving voltage belove 60 V can make wide angle scanning and satisfy the demand of 64~256 point per second.

KW - Angle

KW - Frequency

KW - Imaging lidar

KW - Imaging systems

KW - Micro electro mechnical system

UR - https://www.scopus.com/pages/publications/84907561283

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DO - 10.3788/AOS201434.s111004

M3 - 文章

AN - SCOPUS:84907561283

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JO - Guangxue Xuebao/Acta Optica Sinica

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M1 - s111004

ER -

Vibration performance researching in the MEMS galvanometer of an imaging lidar system

Abstract

Keywords

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