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Vertical Al2Se3/MoSe2 heterojunction on sapphire synthesized using ion beam

  • Hsu Sheng Tsai*
  • , Jhe Wei Liou
  • , Yi Chung Wang
  • , Chia Wei Chen
  • , Yu Lun Chueh
  • , Ching Hung Hsiao
  • , Hao Ouyang
  • , Wei Yen Woon
  • , Jenq Horng Liang
  • *Corresponding author for this work
  • National Tsing Hua University
  • National Central University

Research output: Contribution to journalArticlepeer-review

Abstract

The vertical Al2Se3/MoSe2 heterojunction on sapphire was first fabricated via an ion beam-assisted process. The MoSe2 was formed via Mo selenization, while Al2Se3 was formed via Se substitution for O in sapphire. The applications of this heterojunction will be developed in the future.

Original languageEnglish
Pages (from-to)10154-10157
Number of pages4
JournalRSC Advances
Volume7
Issue number17
DOIs
StatePublished - 2017
Externally publishedYes

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