@inproceedings{e8e80e02b1154016bead98a51c601cc4,
title = "Velocity-region dual adaptive path planning for ICP jet processing of ultra-thin optical elements",
abstract = "Over the past few years, atmospheric Inductively Coupled Plasma (ICP) has aroused extensive attention in optical fabrication field since its chemical etching-based processing mode does not mechanically damage work-pieces. However, the principle of chemical etching will inevitably bring some processing temperature while maintaining the efficiency. This makes the ICP jet easily cause thermal damage to the ultra-thin or low thermal conductivity optical elements, even cause the element to crack seriously. Therefore, this paper proposes a velocity-region dual adaptive path planning algorithm, which reduces the processing temperature by limiting the moving velocity of a single path, and achieves the removal of excessive peaks through Repeated traversals.",
keywords = "ICP jet processing, Path planning, Ultra-thin optical elements, Velocity-region dual adaptive",
author = "Yuan Jin and Peng Ji and Bo Wang and Fei DIng and Zheng Qiao and Duo Li",
note = "Publisher Copyright: {\textcopyright} COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.; 7th Asia Pacific Conference on Optics Manufacture, APCOM 2021 ; Conference date: 28-10-2021 Through 31-10-2021",
year = "2022",
doi = "10.1117/12.2617328",
language = "英语",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Jiubin Tan and Xiangang Luo and Ming Huang and Lingbao Kong and Dawei Zhang",
booktitle = "Seventh Asia Pacific Conference on Optics Manufacture, APCOM 2021",
address = "美国",
}