Valveless micropump with planar channel based on silicon anisotropic etching

Guowei Zhang; Xiaowei Liu; Weiping Chen; Henan Ni; Xilian Wang

Valveless micropump with planar channel based on silicon anisotropic etching

Guowei Zhang^*
, Xiaowei Liu
, Weiping Chen
, Henan Ni
, Xilian Wang

^*Corresponding author for this work

School of Astronautics

Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

The valveless micropumps with various geometric structures were designed according to the diffuser/nozzle theory. A lot of valveless micropumps were fabricated by IC and MEMS technology including anisotropic etching and anodic bonding. The pressure and flow rate of pumps were researched, and the results show that the pump pressure increase in inverse proportion to flow rate. The pressure and flow rate of micropump achieve 14.9 kPa and 558 μL/min respectively, while the angle, length, breadth and etching depth of diffuser/nozzle is 8°, 2400 μm, 150 μm and 150 μm respectively.

Original language	English
Pages (from-to)	119-121
Number of pages	3
Journal	Zhongguo Jixie Gongcheng/China Mechanical Engineering
Volume	16
Issue number	SUPPL.
State	Published - Jul 2005

Keywords

Diffuser
Nozzle
Pump pressure
Valveless micropump

Cite this

@article{3cfbe9d8d7284988816f4c7b84b05e0f,

title = "Valveless micropump with planar channel based on silicon anisotropic etching",

abstract = "The valveless micropumps with various geometric structures were designed according to the diffuser/nozzle theory. A lot of valveless micropumps were fabricated by IC and MEMS technology including anisotropic etching and anodic bonding. The pressure and flow rate of pumps were researched, and the results show that the pump pressure increase in inverse proportion to flow rate. The pressure and flow rate of micropump achieve 14.9 kPa and 558 μL/min respectively, while the angle, length, breadth and etching depth of diffuser/nozzle is 8°, 2400 μm, 150 μm and 150 μm respectively.",

keywords = "Diffuser, Nozzle, Pump pressure, Valveless micropump",

author = "Guowei Zhang and Xiaowei Liu and Weiping Chen and Henan Ni and Xilian Wang",

year = "2005",

month = jul,

language = "英语",

volume = "16",

pages = "119--121",

journal = "Zhongguo Jixie Gongcheng/China Mechanical Engineering",

issn = "1004-132X",

publisher = "Chinese Mechanical Engineering Society",

number = "SUPPL.",

}

TY - JOUR

T1 - Valveless micropump with planar channel based on silicon anisotropic etching

AU - Zhang, Guowei

AU - Liu, Xiaowei

AU - Chen, Weiping

AU - Ni, Henan

AU - Wang, Xilian

PY - 2005/7

Y1 - 2005/7

N2 - The valveless micropumps with various geometric structures were designed according to the diffuser/nozzle theory. A lot of valveless micropumps were fabricated by IC and MEMS technology including anisotropic etching and anodic bonding. The pressure and flow rate of pumps were researched, and the results show that the pump pressure increase in inverse proportion to flow rate. The pressure and flow rate of micropump achieve 14.9 kPa and 558 μL/min respectively, while the angle, length, breadth and etching depth of diffuser/nozzle is 8°, 2400 μm, 150 μm and 150 μm respectively.

AB - The valveless micropumps with various geometric structures were designed according to the diffuser/nozzle theory. A lot of valveless micropumps were fabricated by IC and MEMS technology including anisotropic etching and anodic bonding. The pressure and flow rate of pumps were researched, and the results show that the pump pressure increase in inverse proportion to flow rate. The pressure and flow rate of micropump achieve 14.9 kPa and 558 μL/min respectively, while the angle, length, breadth and etching depth of diffuser/nozzle is 8°, 2400 μm, 150 μm and 150 μm respectively.

KW - Diffuser

KW - Nozzle

KW - Pump pressure

KW - Valveless micropump

UR - https://www.scopus.com/pages/publications/23744483835

M3 - 文章

AN - SCOPUS:23744483835

SN - 1004-132X

VL - 16

SP - 119

EP - 121

JO - Zhongguo Jixie Gongcheng/China Mechanical Engineering

JF - Zhongguo Jixie Gongcheng/China Mechanical Engineering

IS - SUPPL.

ER -

Valveless micropump with planar channel based on silicon anisotropic etching

Abstract

Keywords

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