Vacuum evaporation coating technology

Fuzhen Wang; Junwei Wu

doi:10.1016/B978-0-323-90833-7.00004-8

Vacuum evaporation coating technology

Fuzhen Wang
, Junwei Wu

Beijing Union University
Harbin Institute of Technology

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

Abstract

This chapter introduces the characteristics of vacuum evaporation technology. With this technology, metal atoms are evaporated with heat energy, and the evaporated metal atoms form a thin film on the workpiece surface. Metal evaporation sources include resistance evaporation source, e-type electron gun evaporation source, induction heating evaporation source, and laser evaporation source. In addition, this chapter further explains the nucleation and growth of the film during vacuum evaporation and the influence of vacuum on the film structure. Vertical and winding coating machines are introduced at the end of this chapter.

Original language	English
Title of host publication	Modern Ion Plating Technology
Subtitle of host publication	Fundamentals and Applications
Publisher	Elsevier
Pages	91-114
Number of pages	24
ISBN (Electronic)	9780323908337
ISBN (Print)	9780323908344
DOIs	https://doi.org/10.1016/B978-0-323-90833-7.00004-8
State	Published - 1 Jan 2023
Externally published	Yes

Keywords

Resistance evaporation source
e-type electron gun evaporation source
induction heating evaporation source
laser evaporation source
vacuum evaporation

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10.1016/B978-0-323-90833-7.00004-8

Cite this

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AB - This chapter introduces the characteristics of vacuum evaporation technology. With this technology, metal atoms are evaporated with heat energy, and the evaporated metal atoms form a thin film on the workpiece surface. Metal evaporation sources include resistance evaporation source, e-type electron gun evaporation source, induction heating evaporation source, and laser evaporation source. In addition, this chapter further explains the nucleation and growth of the film during vacuum evaporation and the influence of vacuum on the film structure. Vertical and winding coating machines are introduced at the end of this chapter.

KW - Resistance evaporation source

KW - e-type electron gun evaporation source

KW - induction heating evaporation source

KW - laser evaporation source

KW - vacuum evaporation

UR - https://www.scopus.com/pages/publications/85150100300

U2 - 10.1016/B978-0-323-90833-7.00004-8

DO - 10.1016/B978-0-323-90833-7.00004-8

M3 - 章节

AN - SCOPUS:85150100300

SN - 9780323908344

SP - 91

EP - 114

BT - Modern Ion Plating Technology

PB - Elsevier

ER -

Vacuum evaporation coating technology

Abstract

Keywords

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