Uncertainty in nano-scale linewidth measurements using atomic force microscope

Wei Chu; Xue Zeng Zhao; Ling Wang; Zeng Wen Xiao; Hong Bo Li

Uncertainty in nano-scale linewidth measurements using atomic force microscope

Wei Chu^*
, Xue Zeng Zhao
, Ling Wang
, Zeng Wen Xiao
, Hong Bo Li

^*Corresponding author for this work

Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

For atomic force microscope (AFM)-NanoscopeIII, the uncertainty of nano-scale linewidth measurement is analyzed. An error correction step of linewidth measurement is given, and four factors that affect linewidth measurement result are analyzed. Based on the experiment and the measurement course, width of the sample, the uncertainty components and the composed uncertainty are analyzed and calculated.

Original language	English
Pages (from-to)	120-124
Number of pages	5
Journal	Jiliang Xuebao/Acta Metrologica Sinica
Volume	26
Issue number	2
State	Published - Apr 2005

Keywords

Atomic force microscope
Measurement uncertainty
Metrology
Nano-scale linewidth

Cite this

@article{61b2df9e54d444f69443763830570299,

title = "Uncertainty in nano-scale linewidth measurements using atomic force microscope",

abstract = "For atomic force microscope (AFM)-NanoscopeIII, the uncertainty of nano-scale linewidth measurement is analyzed. An error correction step of linewidth measurement is given, and four factors that affect linewidth measurement result are analyzed. Based on the experiment and the measurement course, width of the sample, the uncertainty components and the composed uncertainty are analyzed and calculated.",

keywords = "Atomic force microscope, Measurement uncertainty, Metrology, Nano-scale linewidth",

author = "Wei Chu and Zhao, \{Xue Zeng\} and Ling Wang and Xiao, \{Zeng Wen\} and Li, \{Hong Bo\}",

year = "2005",

month = apr,

language = "英语",

volume = "26",

pages = "120--124",

journal = "Jiliang Xuebao/Acta Metrologica Sinica",

issn = "1000-1158",

publisher = "Chinese Society for Measurement",

number = "2",

}

TY - JOUR

T1 - Uncertainty in nano-scale linewidth measurements using atomic force microscope

AU - Chu, Wei

AU - Zhao, Xue Zeng

AU - Wang, Ling

AU - Xiao, Zeng Wen

AU - Li, Hong Bo

PY - 2005/4

Y1 - 2005/4

N2 - For atomic force microscope (AFM)-NanoscopeIII, the uncertainty of nano-scale linewidth measurement is analyzed. An error correction step of linewidth measurement is given, and four factors that affect linewidth measurement result are analyzed. Based on the experiment and the measurement course, width of the sample, the uncertainty components and the composed uncertainty are analyzed and calculated.

AB - For atomic force microscope (AFM)-NanoscopeIII, the uncertainty of nano-scale linewidth measurement is analyzed. An error correction step of linewidth measurement is given, and four factors that affect linewidth measurement result are analyzed. Based on the experiment and the measurement course, width of the sample, the uncertainty components and the composed uncertainty are analyzed and calculated.

KW - Atomic force microscope

KW - Measurement uncertainty

KW - Metrology

KW - Nano-scale linewidth

UR - https://www.scopus.com/pages/publications/18344363406

M3 - 文章

AN - SCOPUS:18344363406

SN - 1000-1158

VL - 26

SP - 120

EP - 124

JO - Jiliang Xuebao/Acta Metrologica Sinica

JF - Jiliang Xuebao/Acta Metrologica Sinica

IS - 2

ER -

Uncertainty in nano-scale linewidth measurements using atomic force microscope

Abstract

Keywords

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