@inproceedings{46a56d24cc854bfca2c372106954ce42,
title = "Ultrasonic vibration assisted polishing of micro-structured surfaces on SiC ceramics",
abstract = "In consideration of increasing the MRR and improving the micro-structured surface quality, ultrasonic vibration assisted polishing (UVAP) of micro-structured surfaces on SiC is proposed in this paper. The experimental results shown that when compared with conventional polishing, the MRR can be improved from 34.67 nm · min-1 to 44.28 nm · min-1 in depth. Meanwhile, the polished surface roughness of microstructures is improved to 16.5nm (Ra) by a factor of 2 over the conventionally abrasive polished (AP) surface. In addition, there are no subsurface cracks can be found in the UVAP SiC micro-structures.",
author = "Sun, \{Z. Y.\} and Zhao, \{Q. L.\} and B. Guo",
year = "2014",
language = "英语",
series = "Conference Proceedings - 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014",
publisher = "euspen",
pages = "67--70",
editor = "R. Leach",
booktitle = "Conference Proceedings - 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014",
note = "14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014 ; Conference date: 02-06-2014 Through 06-06-2014",
}