Abstract
A high-sensitivity and miniature open cavity Fabry-Perot interferometer (OCFPI) encapsulated with the polydimethylsiloxane (PDMS) film based on the high-order harmonic Vernier effect is designed and experimentally investigated. To the best of our knowledge, PDMS is applied for the first time to fill the OCFPI to obtain high-temperature sensitivity. The resonant dip (peak) wavelength of the designed temperature sensor monotonically moves toward the shortwave direction as the temperature increases from 40 °C to 60~{circ }text{C} due to the effects of expansion and thermo-optic property of PDMS. The proposed OCFPI encapsulated with PDMS film provides the following excellent performance advantages: 1) compared with traditional all-fiber air-cavity OCFPIs with the temperature sensitivity of approximately 10 pm/°C, the proposed OCFPI sensor has a much higher temperature sensitivity of -3.4 nm/°C at the temperature range of 40~{circ }text{C} - 60~{circ }text{C} with a magnification factor ({M} -factor) of approximately 11 when the order of harmonic Vernier effect {i} =4 ; 2) the proposed OCFPI exhibits good reversibility during the heating and cooling processes, and the measured {M} -factor matches well with the theoretically calculated {M} -factor; 3) the proposed OCFPI shows excellent stability with maximum wavelength deviation of 0.567 nm (internal envelope based on a fourth-order harmonic Vernier effect) and 0.042 nm (upper envelope) within 450 min; and 4) the proposed OCFPI is inexpensive, robust, easy to fabricate, and compact, which can be used in harsh environments. Therefore, it provides excellent potential in dynamic temperature measurement.
| Original language | English |
|---|---|
| Pages (from-to) | 381-388 |
| Number of pages | 8 |
| Journal | IEEE Sensors Journal |
| Volume | 23 |
| Issue number | 1 |
| DOIs | |
| State | Published - 1 Jan 2023 |
| Externally published | Yes |
Keywords
- High-order harmonic Vernier effect
- magnification factor (M-factor)
- open cavity Fabry-Perot interferometer (FPI)
- polydimethylsiloxane (PDMS) film
- temperature
Fingerprint
Dive into the research topics of 'Ultrahigh Sensitivity Temperature Sensor Based on Harmonic Vernier Effect'. Together they form a unique fingerprint.Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver