Abstract
In order to realize the ultra-precision grinding of high-gradient thin conformal aspheric on ALON infrared ceramic, the material property of ALON and the structured feature of high-gradient thin conformal aspheric was analyzed firstly. The precision jig was design and the main dimensions were optimized by finite element method. Secondly, the ALON grinding experiments were implemented. The results indicated that although the roughness would reduce with the decrease of workpiece spindle speed and wheel abrasive size, the effect of abrasive size on roughness was more significant. Finally, the ultra-precision grinding procedures were established for ALON high-gradient thin conformal aspheric. The form accuracy PV value of ground ALON workpiece was 2 μm, while the surface roughness was 8.6 nm.
| Original language | English |
|---|---|
| Pages (from-to) | 93-99 |
| Number of pages | 7 |
| Journal | Guangxue Jingmi Gongcheng/Optics and Precision Engineering |
| Volume | 25 |
| Issue number | 1 |
| DOIs | |
| State | Published - 1 Jan 2017 |
Keywords
- ALON
- Conformal aspheric
- High-gradient thin structure
- Jig design
- Ultra-precision grinding
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