@inproceedings{a8ad668a3f9f428089babe00a0fd3847,
title = "Ultra-precision grinding and accuracy measurement of the hard-brittle thin-walled tubular optics",
abstract = "Hard-brittle thin-walled tubular optics are widely used in the field of high-power solid-state lasers. The 3D accuracy requirement and the clamping deformation of the hard and brittle thin-walled structure pose a great challenge for ultra-precision manufacturing. In this paper, fused silica thin-walled tubular optics with the length of 100mm, the inner diameter of 42mm and the outer diameter of 50mm were fabricated successfully through ultra-precision grinding. The profile accuracy of PV1.6μm, the surface roughness of Ra10nm, the straightness of 1.64μm, the roundness of 1.62μm and the cylindricity of 2.13μm were achieved through in-place dressing of grinding wheel, on-machine measurement, off-line measurement, and the iterative compensation machining. The technical difficulties of ultra-precision manufacturing of hard brittle thin-walled optics have been overcome.",
keywords = "3D profile accuracy, Hard-brittle thin-walled tubular optics, fused silica, surface roughness, ultra-precision grinding",
author = "Hang Yin and Sheng Wang and Qingliang Zhao and Bing Guo and Jianbo Zhao",
note = "Publisher Copyright: {\textcopyright} COPYRIGHT SPIE.; 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Metrology Technologies 2021 ; Conference date: 14-06-2021 Through 17-06-2021",
year = "2021",
doi = "10.1117/12.2604310",
language = "英语",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Mingbo Pu and Marsh, \{John H.\} and Bin Fan and Yifan Dai and Xiong Li and Xiangang Luo",
booktitle = "10th International Symposium on Advanced Optical Manufacturing and Testing Technologies",
address = "美国",
}