@inproceedings{d59dbb797f174a2a95d04e87dca9abcb,
title = "Tunable Metamaterial IR Emitter by Using MEMS Microheater",
abstract = "We proposed an effective metamaterial infrared (IR) emitter by using MEMS microheater with different pattern density. A highest heating efficiency of MEMS microheater is under the pattern density of 49\%. The metamaterial is composed of π ·shape nanostructures on the surface of MEMS microheater to form a metamaterial IR emitter. By changing gap width of π shape metamaterial, the emissivity of IR emitter is blue shift and enhances its emissivity. The emissivity of metamaterial IR emitter is 0.94 at wavelength of 5μm. Such design is able to exhibit a narrowband wavelength in IR wavelength range.",
keywords = "IR emitter, MEMS, metamaterial",
author = "Jun Sha and Wenjun Chen and Kanghong Yan and Ji Luo and Ruijia Xu and Dongyuan Yao and Shaoquan Liao and Jitong Zhong and Shengrong Yang and Yangbin Yu and Yanlin Tong and Zefeng Xu and Xiaoyan Liu and Lin, \{Yu Sheng\}",
note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 ; Conference date: 29-07-2018 Through 02-08-2018",
year = "2018",
month = sep,
day = "4",
doi = "10.1109/OMN.2018.8454603",
language = "英语",
isbn = "9781509063727",
series = "International Conference on Optical MEMS and Nanophotonics",
publisher = "IEEE Computer Society",
booktitle = "International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings",
address = "美国",
}