Transparency, wettability, and tribological properties of amorphous hydrogenated carbon films deposited on PMMA by RF-PECVD

J. Li; X. B. Tian; S. Q. Yang; R. K.Y. Fu; Paul K. Chu

doi:10.1109/PLASMA.2009.5227467

Transparency, wettability, and tribological properties of amorphous hydrogenated carbon films deposited on PMMA by RF-PECVD

J. Li^*
, X. B. Tian
, S. Q. Yang
, R. K.Y. Fu
, Paul K. Chu

^*Corresponding author for this work

City University of Hong Kong
Harbin Institute of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	2009 IEEE International Conference on Plasma Science - Abstracts, ICOPS 2009
DOIs	https://doi.org/10.1109/PLASMA.2009.5227467
State	Published - 2009
Externally published	Yes
Event	2009 IEEE International Conference on Plasma Science - Abstracts, ICOPS 2009 - San Diego, CA, United States Duration: 1 Jun 2009 → 5 Jun 2009

Publication series

Name	IEEE International Conference on Plasma Science
ISSN (Print)	0730-9244

Conference

Conference	2009 IEEE International Conference on Plasma Science - Abstracts, ICOPS 2009
Country/Territory	United States
City	San Diego, CA
Period	1/06/09 → 5/06/09

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10.1109/PLASMA.2009.5227467

Cite this

Li, J., Tian, X. B., Yang, S. Q., Fu, R. K. Y., & Chu, P. K. (2009). Transparency, wettability, and tribological properties of amorphous hydrogenated carbon films deposited on PMMA by RF-PECVD. In 2009 IEEE International Conference on Plasma Science - Abstracts, ICOPS 2009 Article 5227467 (IEEE International Conference on Plasma Science). https://doi.org/10.1109/PLASMA.2009.5227467

@inproceedings{6130f66931b94209ab023bb05f2402ac,

title = "Transparency, wettability, and tribological properties of amorphous hydrogenated carbon films deposited on PMMA by RF-PECVD",

author = "J. Li and Tian, \{X. B.\} and Yang, \{S. Q.\} and Fu, \{R. K.Y.\} and Chu, \{Paul K.\}",

year = "2009",

doi = "10.1109/PLASMA.2009.5227467",

language = "英语",

isbn = "9781424426188",

series = "IEEE International Conference on Plasma Science",

booktitle = "2009 IEEE International Conference on Plasma Science - Abstracts, ICOPS 2009",

note = "2009 IEEE International Conference on Plasma Science - Abstracts, ICOPS 2009 ; Conference date: 01-06-2009 Through 05-06-2009",

}

Li, J, Tian, XB, Yang, SQ, Fu, RKY & Chu, PK 2009, Transparency, wettability, and tribological properties of amorphous hydrogenated carbon films deposited on PMMA by RF-PECVD. in 2009 IEEE International Conference on Plasma Science - Abstracts, ICOPS 2009., 5227467, IEEE International Conference on Plasma Science, 2009 IEEE International Conference on Plasma Science - Abstracts, ICOPS 2009, San Diego, CA, United States, 1/06/09. https://doi.org/10.1109/PLASMA.2009.5227467

Transparency, wettability, and tribological properties of amorphous hydrogenated carbon films deposited on PMMA by RF-PECVD. / Li, J.; Tian, X. B.; Yang, S. Q. et al.
2009 IEEE International Conference on Plasma Science - Abstracts, ICOPS 2009. 2009. 5227467 (IEEE International Conference on Plasma Science).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Transparency, wettability, and tribological properties of amorphous hydrogenated carbon films deposited on PMMA by RF-PECVD

AU - Li, J.

AU - Tian, X. B.

AU - Yang, S. Q.

AU - Fu, R. K.Y.

AU - Chu, Paul K.

PY - 2009

Y1 - 2009

UR - https://www.scopus.com/pages/publications/70350702441

U2 - 10.1109/PLASMA.2009.5227467

DO - 10.1109/PLASMA.2009.5227467

M3 - 会议稿件

AN - SCOPUS:70350702441

SN - 9781424426188

T3 - IEEE International Conference on Plasma Science

BT - 2009 IEEE International Conference on Plasma Science - Abstracts, ICOPS 2009

T2 - 2009 IEEE International Conference on Plasma Science - Abstracts, ICOPS 2009

Y2 - 1 June 2009 through 5 June 2009

ER -

Transparency, wettability, and tribological properties of amorphous hydrogenated carbon films deposited on PMMA by RF-PECVD

Publication series

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