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Toughness evaluation of hard coatings and thin films

  • Sam Zhang*
  • , Xiaomin Zhang
  • *Corresponding author for this work
  • Nanyang Technological University

Research output: Contribution to journalReview articlepeer-review

Abstract

Enormous progress has been achieved over the past decade in evaluating the toughness of hard coatings and thin films. This paper reviews methodologies developed based on indentation, bending, and microtensile testing. In addition, we discuss a recent development in fracture toughness measurement which involves the application of macrotension to a substrate in order to induce microtension in a patterned thin film.

Original languageEnglish
Pages (from-to)2375-2389
Number of pages15
JournalThin Solid Films
Volume520
Issue number7
DOIs
StatePublished - 31 Jan 2012
Externally publishedYes

Keywords

  • Coatings
  • Fracture toughness
  • Thin films

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