Topology optimization of a linear-motor actuated parallel XY stage

The target of the paper is to use topology optimization technique to design an XY stage with high performances serving as a motion module for next generation of semiconductor manufacturing equipments. By experiment and analysis, two components, the thruster and the bridge, are identified as the major influencing parts that should be carefully designed. The topology optimization problem is formulated as an optimization problem, where the compliance and natural frequencies are objectives and the material volume is taken as constraints. By the topology optimization and reconstruction technique, an improved prototype of the parallel XY stage was manufactured. The major contribution of the paper is to introduce a topology optimization a mechanical part with respect to performance of the overall mechanical system, instead of the performance of the single mechanical part.