Top-down nanomechanical machining of three-dimensional nanostructures by atomic force microscopy

Yongda Yan; Zhenjiang Hu; Xueshen Zhao; Tao Sun; Shen Dong; Xiaodong Li

doi:10.1002/smll.200901947

Top-down nanomechanical machining of three-dimensional nanostructures by atomic force microscopy

Yongda Yan
, Zhenjiang Hu
, Xueshen Zhao
, Tao Sun
, Shen Dong^*
, Xiaodong Li

^*Corresponding author for this work

School of Mechatronics Engineering, Harbin Institute of Technology
University of South Carolina

Research output: Contribution to journal › Article › peer-review

125 Scopus citations

Abstract

A closed-loop nanoscale precision stage is integrated with an atomic force microscope to mechanically fabricate 3D nanostructures according to predetermined designs, such as 3D human face nanostructures, nanoline arrays of sine-wave and triangular nanostructures, and nanodot arrays of sine-shaped, hemispheric, and concave/convex nanopatterns in a controllable and reproducible fashion.

Original language	English
Pages (from-to)	724-728
Number of pages	5
Journal	Small
Volume	6
Issue number	6
DOIs	https://doi.org/10.1002/smll.200901947
State	Published - 22 Mar 2010
Externally published	Yes

Keywords

Atomic force microscopy
Nanofabrication
Nanostructures
Top-down processes

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10.1002/smll.200901947

Cite this

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title = "Top-down nanomechanical machining of three-dimensional nanostructures by atomic force microscopy",

abstract = "A closed-loop nanoscale precision stage is integrated with an atomic force microscope to mechanically fabricate 3D nanostructures according to predetermined designs, such as 3D human face nanostructures, nanoline arrays of sine-wave and triangular nanostructures, and nanodot arrays of sine-shaped, hemispheric, and concave/convex nanopatterns in a controllable and reproducible fashion.",

keywords = "Atomic force microscopy, Nanofabrication, Nanostructures, Top-down processes",

author = "Yongda Yan and Zhenjiang Hu and Xueshen Zhao and Tao Sun and Shen Dong and Xiaodong Li",

year = "2010",

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doi = "10.1002/smll.200901947",

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T1 - Top-down nanomechanical machining of three-dimensional nanostructures by atomic force microscopy

AU - Yan, Yongda

AU - Hu, Zhenjiang

AU - Zhao, Xueshen

AU - Sun, Tao

AU - Dong, Shen

AU - Li, Xiaodong

PY - 2010/3/22

Y1 - 2010/3/22

N2 - A closed-loop nanoscale precision stage is integrated with an atomic force microscope to mechanically fabricate 3D nanostructures according to predetermined designs, such as 3D human face nanostructures, nanoline arrays of sine-wave and triangular nanostructures, and nanodot arrays of sine-shaped, hemispheric, and concave/convex nanopatterns in a controllable and reproducible fashion.

AB - A closed-loop nanoscale precision stage is integrated with an atomic force microscope to mechanically fabricate 3D nanostructures according to predetermined designs, such as 3D human face nanostructures, nanoline arrays of sine-wave and triangular nanostructures, and nanodot arrays of sine-shaped, hemispheric, and concave/convex nanopatterns in a controllable and reproducible fashion.

KW - Atomic force microscopy

KW - Nanofabrication

KW - Nanostructures

KW - Top-down processes

UR - https://www.scopus.com/pages/publications/77950217699

U2 - 10.1002/smll.200901947

DO - 10.1002/smll.200901947

M3 - 文章

C2 - 20166110

AN - SCOPUS:77950217699

SN - 1613-6810

VL - 6

SP - 724

EP - 728

JO - Small

JF - Small

IS - 6

ER -

Top-down nanomechanical machining of three-dimensional nanostructures by atomic force microscopy

Abstract

Keywords

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