ToF-SIMS study of carbon diffusion in Co-Pt-TiO 2 composite and ruthenium films

Jianhui Wang; Sam Zhang

doi:10.1166/jnn.2010.1887

ToF-SIMS study of carbon diffusion in Co-Pt-TiO ₂ composite and ruthenium films

Jianhui Wang^*
, Sam Zhang

^*Corresponding author for this work

Nanyang Technological University

Research output: Contribution to journal › Article › peer-review

Abstract

In this paper, the diffusion behavior of hydrogenated amorphous carbon into Co-Pt-TiO ₂ and Ruthenium films was first investigated. Impact of carbon on Co-Pt-TiO ₂ composite film and its diffusion in Co-Pt-TiO ₂ and ruthenium films were studied using Time-of-Flight Secondary Ion Mass Spectroscopy. Magnetic coercivity drop was observed for Co-Pt-TiO ₂films coated with ruthenium and carbon hybrid overcoat at varied thickness ratio. Co-Pt-TiO ₂ film is widely used in perpendicular magnetic recording. Carbon depth profile showed that carbon readily diffuses in Co-Pt-TiO ₂ film because of its porous structure. However, carbon diffusion in ruthenium film is limited even annealing up to 200 °C in argon. Carbon's diffusion length and coefficient in Co-Pt-TiO ₂ are much higher than that in Ru film. The activation energy was calculated for both cases.

Original language	English
Pages (from-to)	770-774
Number of pages	5
Journal	Journal of Nanoscience and Nanotechnology
Volume	10
Issue number	2
DOIs	https://doi.org/10.1166/jnn.2010.1887
State	Published - Feb 2010
Externally published	Yes

Keywords

Carbon
Diffusion
Ruthenium barrier
SIMS
TEM
XRD

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10.1166/jnn.2010.1887

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title = "ToF-SIMS study of carbon diffusion in Co-Pt-TiO 2 composite and ruthenium films",

abstract = "In this paper, the diffusion behavior of hydrogenated amorphous carbon into Co-Pt-TiO 2 and Ruthenium films was first investigated. Impact of carbon on Co-Pt-TiO 2 composite film and its diffusion in Co-Pt-TiO 2 and ruthenium films were studied using Time-of-Flight Secondary Ion Mass Spectroscopy. Magnetic coercivity drop was observed for Co-Pt-TiO 2films coated with ruthenium and carbon hybrid overcoat at varied thickness ratio. Co-Pt-TiO 2 film is widely used in perpendicular magnetic recording. Carbon depth profile showed that carbon readily diffuses in Co-Pt-TiO 2 film because of its porous structure. However, carbon diffusion in ruthenium film is limited even annealing up to 200 °C in argon. Carbon's diffusion length and coefficient in Co-Pt-TiO 2 are much higher than that in Ru film. The activation energy was calculated for both cases.",

keywords = "Carbon, Diffusion, Ruthenium barrier, SIMS, TEM, XRD",

author = "Jianhui Wang and Sam Zhang",

year = "2010",

month = feb,

doi = "10.1166/jnn.2010.1887",

language = "英语",

volume = "10",

pages = "770--774",

journal = "Journal of Nanoscience and Nanotechnology",

issn = "1533-4880",

publisher = "American Scientific Publishers",

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TY - JOUR

T1 - ToF-SIMS study of carbon diffusion in Co-Pt-TiO 2 composite and ruthenium films

AU - Wang, Jianhui

AU - Zhang, Sam

PY - 2010/2

Y1 - 2010/2

N2 - In this paper, the diffusion behavior of hydrogenated amorphous carbon into Co-Pt-TiO 2 and Ruthenium films was first investigated. Impact of carbon on Co-Pt-TiO 2 composite film and its diffusion in Co-Pt-TiO 2 and ruthenium films were studied using Time-of-Flight Secondary Ion Mass Spectroscopy. Magnetic coercivity drop was observed for Co-Pt-TiO 2films coated with ruthenium and carbon hybrid overcoat at varied thickness ratio. Co-Pt-TiO 2 film is widely used in perpendicular magnetic recording. Carbon depth profile showed that carbon readily diffuses in Co-Pt-TiO 2 film because of its porous structure. However, carbon diffusion in ruthenium film is limited even annealing up to 200 °C in argon. Carbon's diffusion length and coefficient in Co-Pt-TiO 2 are much higher than that in Ru film. The activation energy was calculated for both cases.

AB - In this paper, the diffusion behavior of hydrogenated amorphous carbon into Co-Pt-TiO 2 and Ruthenium films was first investigated. Impact of carbon on Co-Pt-TiO 2 composite film and its diffusion in Co-Pt-TiO 2 and ruthenium films were studied using Time-of-Flight Secondary Ion Mass Spectroscopy. Magnetic coercivity drop was observed for Co-Pt-TiO 2films coated with ruthenium and carbon hybrid overcoat at varied thickness ratio. Co-Pt-TiO 2 film is widely used in perpendicular magnetic recording. Carbon depth profile showed that carbon readily diffuses in Co-Pt-TiO 2 film because of its porous structure. However, carbon diffusion in ruthenium film is limited even annealing up to 200 °C in argon. Carbon's diffusion length and coefficient in Co-Pt-TiO 2 are much higher than that in Ru film. The activation energy was calculated for both cases.

KW - Carbon

KW - Diffusion

KW - Ruthenium barrier

KW - SIMS

KW - TEM

KW - XRD

UR - https://www.scopus.com/pages/publications/77954960611

U2 - 10.1166/jnn.2010.1887

DO - 10.1166/jnn.2010.1887

M3 - 文章

AN - SCOPUS:77954960611

SN - 1533-4880

VL - 10

SP - 770

EP - 774

JO - Journal of Nanoscience and Nanotechnology

JF - Journal of Nanoscience and Nanotechnology

IS - 2

ER -

ToF-SIMS study of carbon diffusion in Co-Pt-TiO ₂ composite and ruthenium films

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Keywords

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