Tip current/positioning close-loop mode of scanning electrochemical microscopy for electrochemical micromachining

Lianhuan Han; Xuesen Zhao; Zhenjiang Hu; Jie Zhang; Yongzhi Cao; Yongda Yan; Zhong Qun Tian; Zhao Wu Tian; Dongping Zhan

doi:10.1016/j.elecom.2017.07.023

Tip current/positioning close-loop mode of scanning electrochemical microscopy for electrochemical micromachining

Lianhuan Han
, Xuesen Zhao
, Zhenjiang Hu
, Jie Zhang
, Yongzhi Cao
, Yongda Yan^*
, Zhong Qun Tian
, Zhao Wu Tian
, Dongping Zhan

^*Corresponding author for this work

School of Mechatronics Engineering

Harbin Institute of Technology
Xiamen University

Research output: Contribution to journal › Article › peer-review

15 Scopus citations

Abstract

Scanning electrochemical microscopy (SECM) has been approved as a prospective electrochemical micromachining (ECMM) technique soon after its birth. However, it still remains challenge for SECM to fabricate arbitrary three-dimensional (3D) microstructures because of the limitation of positioning system. To solve this problem, we proposed a tip current signal/positioning close-loop mode in which the tip current signal is fed back to the positioning system in order to program the motion trial of SECM tip. Both the triedge-cone and sinusoidal microstructures were obtained by the close-loop positioning mode. The static-state etching process was demonstrated not to be disturbed by the slow motion rate of SECM tip. The unique positioning mode would be significant for both ECMM and electrochemical imaging.

Original language	English
Pages (from-to)	117-120
Number of pages	4
Journal	Electrochemistry Communications
Volume	82
DOIs	https://doi.org/10.1016/j.elecom.2017.07.023
State	Published - Sep 2017

Keywords

Close-loop positioning mode
ECMM
Electrochemical micromachining
SECM
Scanning electrochemical microscopy

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10.1016/j.elecom.2017.07.023

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@article{1ec98223d54542a799f98ac6e5fcf305,

title = "Tip current/positioning close-loop mode of scanning electrochemical microscopy for electrochemical micromachining",

abstract = "Scanning electrochemical microscopy (SECM) has been approved as a prospective electrochemical micromachining (ECMM) technique soon after its birth. However, it still remains challenge for SECM to fabricate arbitrary three-dimensional (3D) microstructures because of the limitation of positioning system. To solve this problem, we proposed a tip current signal/positioning close-loop mode in which the tip current signal is fed back to the positioning system in order to program the motion trial of SECM tip. Both the triedge-cone and sinusoidal microstructures were obtained by the close-loop positioning mode. The static-state etching process was demonstrated not to be disturbed by the slow motion rate of SECM tip. The unique positioning mode would be significant for both ECMM and electrochemical imaging.",

keywords = "Close-loop positioning mode, ECMM, Electrochemical micromachining, SECM, Scanning electrochemical microscopy",

author = "Lianhuan Han and Xuesen Zhao and Zhenjiang Hu and Jie Zhang and Yongzhi Cao and Yongda Yan and Tian, \{Zhong Qun\} and Tian, \{Zhao Wu\} and Dongping Zhan",

note = "Publisher Copyright: {\textcopyright} 2017 Elsevier B.V.",

year = "2017",

month = sep,

doi = "10.1016/j.elecom.2017.07.023",

language = "英语",

volume = "82",

pages = "117--120",

journal = "Electrochemistry Communications",

issn = "1388-2481",

publisher = "Elsevier Inc.",

}

TY - JOUR

T1 - Tip current/positioning close-loop mode of scanning electrochemical microscopy for electrochemical micromachining

AU - Han, Lianhuan

AU - Zhao, Xuesen

AU - Hu, Zhenjiang

AU - Zhang, Jie

AU - Cao, Yongzhi

AU - Yan, Yongda

AU - Tian, Zhong Qun

AU - Tian, Zhao Wu

AU - Zhan, Dongping

PY - 2017/9

Y1 - 2017/9

N2 - Scanning electrochemical microscopy (SECM) has been approved as a prospective electrochemical micromachining (ECMM) technique soon after its birth. However, it still remains challenge for SECM to fabricate arbitrary three-dimensional (3D) microstructures because of the limitation of positioning system. To solve this problem, we proposed a tip current signal/positioning close-loop mode in which the tip current signal is fed back to the positioning system in order to program the motion trial of SECM tip. Both the triedge-cone and sinusoidal microstructures were obtained by the close-loop positioning mode. The static-state etching process was demonstrated not to be disturbed by the slow motion rate of SECM tip. The unique positioning mode would be significant for both ECMM and electrochemical imaging.

AB - Scanning electrochemical microscopy (SECM) has been approved as a prospective electrochemical micromachining (ECMM) technique soon after its birth. However, it still remains challenge for SECM to fabricate arbitrary three-dimensional (3D) microstructures because of the limitation of positioning system. To solve this problem, we proposed a tip current signal/positioning close-loop mode in which the tip current signal is fed back to the positioning system in order to program the motion trial of SECM tip. Both the triedge-cone and sinusoidal microstructures were obtained by the close-loop positioning mode. The static-state etching process was demonstrated not to be disturbed by the slow motion rate of SECM tip. The unique positioning mode would be significant for both ECMM and electrochemical imaging.

KW - Close-loop positioning mode

KW - ECMM

KW - Electrochemical micromachining

KW - SECM

KW - Scanning electrochemical microscopy

UR - https://www.scopus.com/pages/publications/85026885508

U2 - 10.1016/j.elecom.2017.07.023

DO - 10.1016/j.elecom.2017.07.023

M3 - 文章

AN - SCOPUS:85026885508

SN - 1388-2481

VL - 82

SP - 117

EP - 120

JO - Electrochemistry Communications

JF - Electrochemistry Communications

ER -

Tip current/positioning close-loop mode of scanning electrochemical microscopy for electrochemical micromachining

Abstract

Keywords

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