Third-order Non-singular Terminal Sliding Mode Trajectory Tracking Control of Piezoelectric Actuators Based on Disturbance Estimation

Aiming at the trajectory tracking control of piezoelectric actuators (PEA), a third-order non-singular terminal sliding mode control scheme for piezoelectric actuators based on disturbance estimation (3-DENTSMC) is proposed in this paper. The advantage of the proposed control scheme is that it can achieve finite-time convergence and high-accuracy disturbance estimation, avoid singular problems, and ensure the continuity of control variables to achieve high-precision control performance. Based on Lyapunov theory, the convergence and stability of the control algorithm are proved. Experiments verify that the control algorithm has improved tracking performance compared with the proposed traditional second-order and third-order SMC methods. The experimental results show that the designed control scheme can track the input signal of a single frequency and composite frequency in a specific frequency range and has good tracking performance.