Thermodynamic analysis of the preparation process of EB-PVD SiC coating

Jian Yi; Xichen Yang; Xiaodong He

doi:10.1007/s11595-009-3363-y

Thermodynamic analysis of the preparation process of EB-PVD SiC coating

Jian Yi^*
, Xichen Yang
, Xiaodong He

^*Corresponding author for this work

School of Astronautics

TaiZhou University
Tiangong University
Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

Abstract

The process of preparing SiC coating by electron beam-physical vapor deposition (EB-PVD) was discussed from viewpoint of thermodynamis. Results show that within the temperature range of 2 700-3 300 K, the ratio of SiC in the SiC coating doesn't change much and keeps around 0.7. Purity of the as-deposited SiC coating is not high. To improve the purity of the SiC coating, the SiC ingot is required to not be, necessary in full density but be fine-grained.

Original language	English
Pages (from-to)	363-366
Number of pages	4
Journal	Journal Wuhan University of Technology, Materials Science Edition
Volume	24
Issue number	3
DOIs	https://doi.org/10.1007/s11595-009-3363-y
State	Published - 2009

Keywords

EB-PVD
Purity
Ratio of SiC
SiC coating
Thermodynamics

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10.1007/s11595-009-3363-y

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title = "Thermodynamic analysis of the preparation process of EB-PVD SiC coating",

abstract = "The process of preparing SiC coating by electron beam-physical vapor deposition (EB-PVD) was discussed from viewpoint of thermodynamis. Results show that within the temperature range of 2 700-3 300 K, the ratio of SiC in the SiC coating doesn't change much and keeps around 0.7. Purity of the as-deposited SiC coating is not high. To improve the purity of the SiC coating, the SiC ingot is required to not be, necessary in full density but be fine-grained.",

keywords = "EB-PVD, Purity, Ratio of SiC, SiC coating, Thermodynamics",

author = "Jian Yi and Xichen Yang and Xiaodong He",

year = "2009",

doi = "10.1007/s11595-009-3363-y",

language = "英语",

volume = "24",

pages = "363--366",

journal = "Journal Wuhan University of Technology, Materials Science Edition",

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T1 - Thermodynamic analysis of the preparation process of EB-PVD SiC coating

AU - Yi, Jian

AU - Yang, Xichen

AU - He, Xiaodong

PY - 2009

Y1 - 2009

N2 - The process of preparing SiC coating by electron beam-physical vapor deposition (EB-PVD) was discussed from viewpoint of thermodynamis. Results show that within the temperature range of 2 700-3 300 K, the ratio of SiC in the SiC coating doesn't change much and keeps around 0.7. Purity of the as-deposited SiC coating is not high. To improve the purity of the SiC coating, the SiC ingot is required to not be, necessary in full density but be fine-grained.

AB - The process of preparing SiC coating by electron beam-physical vapor deposition (EB-PVD) was discussed from viewpoint of thermodynamis. Results show that within the temperature range of 2 700-3 300 K, the ratio of SiC in the SiC coating doesn't change much and keeps around 0.7. Purity of the as-deposited SiC coating is not high. To improve the purity of the SiC coating, the SiC ingot is required to not be, necessary in full density but be fine-grained.

KW - EB-PVD

KW - Purity

KW - Ratio of SiC

KW - SiC coating

KW - Thermodynamics

UR - https://www.scopus.com/pages/publications/70349685013

U2 - 10.1007/s11595-009-3363-y

DO - 10.1007/s11595-009-3363-y

M3 - 文章

AN - SCOPUS:70349685013

SN - 1000-2413

VL - 24

SP - 363

EP - 366

JO - Journal Wuhan University of Technology, Materials Science Edition

JF - Journal Wuhan University of Technology, Materials Science Edition

IS - 3

ER -

Thermodynamic analysis of the preparation process of EB-PVD SiC coating

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Keywords

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