The stability analysis of the capacitive closed-loop micro-accelerometer

In the capacitive closed-loop micro-accelerometer system, very low damp will cause the self-oscillation. According to the analysis of the stability performance of the accelerometer, PID control modular is used in the system to reduce this phenomenon. Meanwhile, Compared with the test results, it is evident that the error capacity caused by the structure effects the stability performance of the whole system serious, and the compensation capacity array is used to reduce this effluence. The result of 2-hour biasing stability test for multi-finger accelerometer is 0.3 mg.