The Role of Pad Block's Support Surface Topography in the Measurement of Optical Glass BK7's Surface Figure

Lele Ren; Feihu Zhang; Defeng Liao; Ang Liu; Yiren Wang; Jian Wang

doi:10.1088/1757-899X/782/2/022100

The Role of Pad Block's Support Surface Topography in the Measurement of Optical Glass BK7's Surface Figure

Lele Ren
, Feihu Zhang
, Defeng Liao
, Ang Liu
, Yiren Wang
, Jian Wang^*

^*Corresponding author for this work

School of Mechatronics Engineering, Harbin Institute of Technology
China Academy of Engineering Physics

Research output: Contribution to journal › Conference article › peer-review

Abstract

Large flat transmission mirrors made from optical glass BK7 are widely used in the high-power laser facility, which are required of stringent specifications for the whole spatial frequency errors. This work reveals the role of pad block's support surface (PBSS) topography in measuring BK7 surface figure. Firstly, the PBSS topography was measured with laser displacement sensor. Secondly, the BK7 surface deformation at different pad blocks were simulated with finite element method and validated by experiments. Finally, a method was proposed to quantitively evaluate the different PBSS topography.

Original language	English
Article number	022100
Journal	IOP Conference Series: Materials Science and Engineering
Volume	782
Issue number	2
DOIs	https://doi.org/10.1088/1757-899X/782/2/022100
State	Published - 14 Apr 2020
Externally published	Yes
Event	2019 3rd International Conference on Energy Material, Chemical Engineering and Mining Engineering, EMCEME 2019 - Qingdao, China Duration: 28 Dec 2019 → 29 Dec 2019

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10.1088/1757-899X/782/2/022100

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@article{270e4f9276f940d4898a5b1b64696b7f,

title = "The Role of Pad Block's Support Surface Topography in the Measurement of Optical Glass BK7's Surface Figure",

abstract = "Large flat transmission mirrors made from optical glass BK7 are widely used in the high-power laser facility, which are required of stringent specifications for the whole spatial frequency errors. This work reveals the role of pad block's support surface (PBSS) topography in measuring BK7 surface figure. Firstly, the PBSS topography was measured with laser displacement sensor. Secondly, the BK7 surface deformation at different pad blocks were simulated with finite element method and validated by experiments. Finally, a method was proposed to quantitively evaluate the different PBSS topography.",

author = "Lele Ren and Feihu Zhang and Defeng Liao and Ang Liu and Yiren Wang and Jian Wang",

note = "Publisher Copyright: {\textcopyright} Published under licence by IOP Publishing Ltd.; 2019 3rd International Conference on Energy Material, Chemical Engineering and Mining Engineering, EMCEME 2019 ; Conference date: 28-12-2019 Through 29-12-2019",

year = "2020",

month = apr,

day = "14",

doi = "10.1088/1757-899X/782/2/022100",

language = "英语",

volume = "782",

journal = "IOP Conference Series: Materials Science and Engineering",

issn = "1757-8981",

publisher = "IOP Publishing Ltd.",

number = "2",

}

TY - JOUR

T1 - The Role of Pad Block's Support Surface Topography in the Measurement of Optical Glass BK7's Surface Figure

AU - Ren, Lele

AU - Zhang, Feihu

AU - Liao, Defeng

AU - Liu, Ang

AU - Wang, Yiren

AU - Wang, Jian

N1 - Publisher Copyright: © Published under licence by IOP Publishing Ltd.

PY - 2020/4/14

Y1 - 2020/4/14

N2 - Large flat transmission mirrors made from optical glass BK7 are widely used in the high-power laser facility, which are required of stringent specifications for the whole spatial frequency errors. This work reveals the role of pad block's support surface (PBSS) topography in measuring BK7 surface figure. Firstly, the PBSS topography was measured with laser displacement sensor. Secondly, the BK7 surface deformation at different pad blocks were simulated with finite element method and validated by experiments. Finally, a method was proposed to quantitively evaluate the different PBSS topography.

AB - Large flat transmission mirrors made from optical glass BK7 are widely used in the high-power laser facility, which are required of stringent specifications for the whole spatial frequency errors. This work reveals the role of pad block's support surface (PBSS) topography in measuring BK7 surface figure. Firstly, the PBSS topography was measured with laser displacement sensor. Secondly, the BK7 surface deformation at different pad blocks were simulated with finite element method and validated by experiments. Finally, a method was proposed to quantitively evaluate the different PBSS topography.

UR - https://www.scopus.com/pages/publications/85083701125

U2 - 10.1088/1757-899X/782/2/022100

DO - 10.1088/1757-899X/782/2/022100

M3 - 会议文章

AN - SCOPUS:85083701125

SN - 1757-8981

VL - 782

JO - IOP Conference Series: Materials Science and Engineering

JF - IOP Conference Series: Materials Science and Engineering

IS - 2

M1 - 022100

T2 - 2019 3rd International Conference on Energy Material, Chemical Engineering and Mining Engineering, EMCEME 2019

Y2 - 28 December 2019 through 29 December 2019

ER -

The Role of Pad Block's Support Surface Topography in the Measurement of Optical Glass BK7's Surface Figure

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