The progress of organic molecular nanolayers ascopper diffusion barriers, part 1: organic molecular nanolayers

Inorganic materials are currently used as interfacial barriers, such as Ta and TaN. These materials cannot form uniform and continuous layers below 3 nm thickness, especially in high depth-to-width aspect ratio features. Organic molecular nanolayers (MNLs) are composed of short organic chains and terminated with desired functional groups, and attractive for modifying surface properties for a variety of applications. For example, MNLs are used as lubricants, in nanolithography, and for corrosion protection. In this paper, the basic requirements for MNLs as copper diffusion barriers were introduced. The various kinds of molecules, which are applied to fabricate the corresponding MNLs, were reviewed; their interaction mechanism were analyzed and discussed, as well as the advantages and disadvantages. In addition, we have prospected the research interests and summarized the progress of this subject in China.