The progress of organic molecular nanolayers ascopper diffusion barriers, part 2: characterization techniques

The investigations of organic molecular nanolayers (MNLs) as copper diffusion barriers are few researched, and the characterization techniques to analyze the MNLs are limitedly developed in China. Therefore, the techniques to characterize the MNLs were introduced in this mini-review, including thermal stable property, electrical property, interfacial adhesion, morphological observation and molecular simulation. The method and principle of determining interfacial adhesion were emphasized; the novel research interests arising from this technique were analyzed as well.