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The process optimization of EFO for copper wire bonding

  • Wei Zhang*
  • , Xiaorui Lv
  • , Chunqing Wang
  • *Corresponding author for this work
  • Harbin Institute of Technology Shenzhen
  • Harbin Institute of Technology

Research output: Contribution to journalConference articlepeer-review

Abstract

This paper investigated the process optimization of electronic flame-off (EFO) which was the melting of a wire tip by an electrical spark to form a free air ball (FAB) for 1.8mil copper wire bonding. The results showed that sparking current and sparking time rather than tail length were the key factors to influence the form of FAB. The FAB was skew and coarse with very small diameter when sparking current was 110mA. However, the FAB would be burned-out when sparking current was 180mA. And the appropriate sparking current was proved to be 130mA∼150mA. When sparking time was too short (0.8ms∼1.0ms), the FAB would appear to be pointed ball or golf ball. However, when sparking time was too long (3ms), the diameter of FAB was much bigger which led to offset ball and golf-bond. The suitable sparking time was proved to be 1.2ms∼2ms.

Original languageEnglish
Pages (from-to)763-766
Number of pages4
JournalAdvanced Materials Research
Volume482-484
DOIs
StatePublished - 2012
Event3rd international Conference on Manufacturing Science and Engineering, ICMSE 2012 - Xiamen, China
Duration: 27 Mar 201229 Mar 2012

Keywords

  • Copper wire bonding
  • EFO
  • FAB
  • Microelectronic packaging

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