Abstract
The electron density of the nonstationary atmospheric pressure discharge in a helium flow is estimated using microwave cavity resonance spectroscopy. For this, a measurement scheme was developed based on a spectrum analyzer and a cylindrical resonator with the first three transverse electric (TE) eigenmodes in the range of 1-1.5 GHz. The main working mode was the TE TE112 mode, which made it possible to place the high-frequency measuring and discharge power supply circuits in the most optimal geometry. By measuring the eigenfrequency shift of this mode and its Q factor, gas-discharge plasma parameters were calculated using the well-known perturbation theory. The results are in good agreement with the known data from the literature. This method was additionally tested on a glass rod and a thin low-pressure gas discharge tube.
| Original language | English |
|---|---|
| Article number | 9328886 |
| Pages (from-to) | 1001-1008 |
| Number of pages | 8 |
| Journal | IEEE Transactions on Plasma Science |
| Volume | 49 |
| Issue number | 3 |
| DOIs | |
| State | Published - Mar 2021 |
| Externally published | Yes |
Keywords
- Atmospheric pressure gas discharge
- collision frequency
- complex permittivity
- electron density
- microwave cavity resonator
- quality factor
- resonant frequency
- transverse electric (TE) mode
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