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The possibility of measuring electron density of plasma at atmospheric pressure by a microwave cavity resonance spectroscopy

  • School of Physics, Harbin Institute of Technology
  • St. Petersburg State University
  • St. Petersburg State Electrotechnical University

Research output: Contribution to journalArticlepeer-review

Abstract

The electron density of the nonstationary atmospheric pressure discharge in a helium flow is estimated using microwave cavity resonance spectroscopy. For this, a measurement scheme was developed based on a spectrum analyzer and a cylindrical resonator with the first three transverse electric (TE) eigenmodes in the range of 1-1.5 GHz. The main working mode was the TE TE112 mode, which made it possible to place the high-frequency measuring and discharge power supply circuits in the most optimal geometry. By measuring the eigenfrequency shift of this mode and its Q factor, gas-discharge plasma parameters were calculated using the well-known perturbation theory. The results are in good agreement with the known data from the literature. This method was additionally tested on a glass rod and a thin low-pressure gas discharge tube.

Original languageEnglish
Article number9328886
Pages (from-to)1001-1008
Number of pages8
JournalIEEE Transactions on Plasma Science
Volume49
Issue number3
DOIs
StatePublished - Mar 2021
Externally publishedYes

Keywords

  • Atmospheric pressure gas discharge
  • collision frequency
  • complex permittivity
  • electron density
  • microwave cavity resonator
  • quality factor
  • resonant frequency
  • transverse electric (TE) mode

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