The optic material removal rate improved by vibration assistance in continuous polishing

To solve the problem of fast convergence in large aperture plane optics continuous polishing, the concept of vibration-assisted polishing is proposed in this paper. The paper first builds a low-frequency short-range vibration processing platform based on large-size polishing tools. Then, the kinematics and polishing pressure of the optics without vibration and vibration are analyzed. Furthermore, the pressure distribution under the element is simulated based on the finite element method. Finally, the material removal rate (MRR) is calculated based on Preston equation, which proves that the removal rate of optics under vibration condition is higher. In this paper, the problem of optics removal efficiency in continuous polishing is solved and the material enhanced removal mechanism is revealed.