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The method for dual-beam laser heterodyne ultra-precision measurement of the glass thickness

  • Yanchao Li
  • , Yanling Yang
  • , Xuesong Xia
  • , Long Gao
  • , Haifang Cong
  • , Chunhui Wang
  • Harbin Institute of Technology

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

A method for measuring thickness of glass is proposed based on laser heterodyne measurement and Doppler measurement, the largest error of simulation results is 0.8%.

Original languageEnglish
Title of host publicationConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2009
StatePublished - 2009
EventConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2009 - Shanghai, China
Duration: 30 Aug 20093 Sep 2009

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

ConferenceConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2009
Country/TerritoryChina
CityShanghai
Period30/08/093/09/09

Keywords

  • Dual-beam laser heterodyne
  • Heterodyne detection
  • Laser Doppler Technology
  • Non-contact measurement

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