The fabrication of micro-array channels with the ultrafine-grained LZ91 Mg-Li alloy by micro-embossing

Qian Su; Jie Xu; Chenxi Wang; Debin Shan; Bin Guo

doi:10.3390/mi9020055

The fabrication of micro-array channels with the ultrafine-grained LZ91 Mg-Li alloy by micro-embossing

Qian Su
, Jie Xu^*
, Chenxi Wang
, Debin Shan
, Bin Guo

^*Corresponding author for this work

School of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

15 Scopus citations

Abstract

The fabrication of the micro-channel array through micro-embossing on an ultrafine-grained (UFG) LZ91 Mg-Li alloy was investigated in this paper. Micro-embossing tests indicated that the depth of the channels increase with increasing temperatures. Micro-array channels with widths ranging from 50 μm to 200 μm were performed with an applied force of 2 kN at 423 K, following by a dwell time of 60 s on the UFG LZ91 Mg-Li alloy. The surface topography indicates that embossed micro-channels for UFG LZ91 Mg-Li with all widths are clearly printed well with good geometrical transferability and no obvious defects. The comparison filling behavior of UFG and the CG LZ91 Mg-Li alloy reveals that grain sizes mainly affect the filling quality of micro-embossing. The results indicate a potential application of the UFG Mg-Li alloy in the mass fabrication of micro-electro-mechanical system (MEMS) components.

Original language	English
Article number	55
Journal	Micromachines
Volume	9
Issue number	2
DOIs	https://doi.org/10.3390/mi9020055
State	Published - 31 Jan 2018

Keywords

Mg-Li alloy
Micro-array channels
Micro-embossing
Ultrafine grains

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@article{00783a7d55fc4274a1754a03f7622cdb,

title = "The fabrication of micro-array channels with the ultrafine-grained LZ91 Mg-Li alloy by micro-embossing",

abstract = "The fabrication of the micro-channel array through micro-embossing on an ultrafine-grained (UFG) LZ91 Mg-Li alloy was investigated in this paper. Micro-embossing tests indicated that the depth of the channels increase with increasing temperatures. Micro-array channels with widths ranging from 50 μm to 200 μm were performed with an applied force of 2 kN at 423 K, following by a dwell time of 60 s on the UFG LZ91 Mg-Li alloy. The surface topography indicates that embossed micro-channels for UFG LZ91 Mg-Li with all widths are clearly printed well with good geometrical transferability and no obvious defects. The comparison filling behavior of UFG and the CG LZ91 Mg-Li alloy reveals that grain sizes mainly affect the filling quality of micro-embossing. The results indicate a potential application of the UFG Mg-Li alloy in the mass fabrication of micro-electro-mechanical system (MEMS) components.",

keywords = "Mg-Li alloy, Micro-array channels, Micro-embossing, Ultrafine grains",

author = "Qian Su and Jie Xu and Chenxi Wang and Debin Shan and Bin Guo",

note = "Publisher Copyright: {\textcopyright} 2018 by the authors.",

year = "2018",

month = jan,

day = "31",

doi = "10.3390/mi9020055",

language = "英语",

volume = "9",

journal = "Micromachines",

issn = "2072-666X",

publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",

number = "2",

}

TY - JOUR

T1 - The fabrication of micro-array channels with the ultrafine-grained LZ91 Mg-Li alloy by micro-embossing

AU - Su, Qian

AU - Xu, Jie

AU - Wang, Chenxi

AU - Shan, Debin

AU - Guo, Bin

PY - 2018/1/31

Y1 - 2018/1/31

N2 - The fabrication of the micro-channel array through micro-embossing on an ultrafine-grained (UFG) LZ91 Mg-Li alloy was investigated in this paper. Micro-embossing tests indicated that the depth of the channels increase with increasing temperatures. Micro-array channels with widths ranging from 50 μm to 200 μm were performed with an applied force of 2 kN at 423 K, following by a dwell time of 60 s on the UFG LZ91 Mg-Li alloy. The surface topography indicates that embossed micro-channels for UFG LZ91 Mg-Li with all widths are clearly printed well with good geometrical transferability and no obvious defects. The comparison filling behavior of UFG and the CG LZ91 Mg-Li alloy reveals that grain sizes mainly affect the filling quality of micro-embossing. The results indicate a potential application of the UFG Mg-Li alloy in the mass fabrication of micro-electro-mechanical system (MEMS) components.

AB - The fabrication of the micro-channel array through micro-embossing on an ultrafine-grained (UFG) LZ91 Mg-Li alloy was investigated in this paper. Micro-embossing tests indicated that the depth of the channels increase with increasing temperatures. Micro-array channels with widths ranging from 50 μm to 200 μm were performed with an applied force of 2 kN at 423 K, following by a dwell time of 60 s on the UFG LZ91 Mg-Li alloy. The surface topography indicates that embossed micro-channels for UFG LZ91 Mg-Li with all widths are clearly printed well with good geometrical transferability and no obvious defects. The comparison filling behavior of UFG and the CG LZ91 Mg-Li alloy reveals that grain sizes mainly affect the filling quality of micro-embossing. The results indicate a potential application of the UFG Mg-Li alloy in the mass fabrication of micro-electro-mechanical system (MEMS) components.

KW - Mg-Li alloy

KW - Micro-array channels

KW - Micro-embossing

KW - Ultrafine grains

UR - https://www.scopus.com/pages/publications/85041541699

U2 - 10.3390/mi9020055

DO - 10.3390/mi9020055

M3 - 文章

AN - SCOPUS:85041541699

SN - 2072-666X

VL - 9

JO - Micromachines

JF - Micromachines

IS - 2

M1 - 55

ER -

The fabrication of micro-array channels with the ultrafine-grained LZ91 Mg-Li alloy by micro-embossing

Abstract

Keywords

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