@inproceedings{c6723194f9b246cab745c835b9b5dcaa,
title = "The Effects of Pulse Length Shortening on Average Substrate Current Density in High Power Impulse Magnetron Discharges",
abstract = "The paper is presenting results of experimental and theoretical studies of short and ultrashort regimes of high-power impulse magnetron sputtering. In experimental part it was demonstrated that the decreasing of the discharge voltage duration leads to a significant increase of the average ion current density to the substrate for the fixed mean discharge power. The use of a spatially averaged magnetron discharge model confirms this experimental trend and provides a theoretical explanation for it.",
keywords = "gas recycling, high-power impulse magnetron sputtering (HiPIMS), magnetron sputtering",
author = "Vasily Kozhevnikov and Vladimir Oskirko and Andrey Solovyev and Sergey Rabotkin and Vyacheslav Semenov and Artem Pavlov",
note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 30th Telecommunications Forum, TELFOR 2022 ; Conference date: 15-11-2022 Through 16-11-2022",
year = "2022",
doi = "10.1109/TELFOR56187.2022.9983747",
language = "英语",
series = "2022 30th Telecommunications Forum, TELFOR 2022 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2022 30th Telecommunications Forum, TELFOR 2022 - Proceedings",
address = "美国",
}