Skip to main navigation Skip to search Skip to main content

The effect of thickness and annealing time on surface segregation in cu/ni, ni/cu film/substrate and cu/ni/si film/film/substrate

  • Y. Lu
  • , C. P. Wang
  • , F. Kong
  • , T. Dai
  • , C. C. Zhao
  • , Xing Jun Liu*
  • *Corresponding author for this work
  • Xiamen University

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The Cu/Ni, Ni/Cu and Cu/Ni/Si film/substrate and film/film/substrate systems were prepared by magnetron sputtering method to investigate the surface segregation. The chemical composition of film was analyzed by Auger Electron Spectroscopy (AES). The microtopographies of the Cu/Ni surface and the cross section of the film were observed by Transmission Electron Microscope (TEM), where the blocky distribution of Ni-rich area on surface of Cu film and columnar grains was observed in the specimen. It is found that the thickness of sputtered film has stronger effect on the composition of segregation layer near the surface than that of the annealing time. The surface segregation could be ascribed to the fast vertical diffusion of the substrate atoms through the columnar grain boundaries and the subsequent lateral surface diffusion.

Original languageEnglish
Title of host publicationApplied Materials and Technologies
EditorsXiaopeng Xiong, Ran Zhang
PublisherTrans Tech Publications Ltd
Pages181-184
Number of pages4
ISBN (Print)9783038355960
DOIs
StatePublished - 2015
Externally publishedYes
Event9th International Forum on Advanced Material Science and Technology, IFAMST9 2014 - Xiamen, China
Duration: 30 Nov 20143 Dec 2014

Publication series

NameMaterials Science Forum
Volume833
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752

Conference

Conference9th International Forum on Advanced Material Science and Technology, IFAMST9 2014
Country/TerritoryChina
CityXiamen
Period30/11/143/12/14

Keywords

  • Annealing time
  • Film thickness
  • Interlayer diffusion
  • Surface segregation

Fingerprint

Dive into the research topics of 'The effect of thickness and annealing time on surface segregation in cu/ni, ni/cu film/substrate and cu/ni/si film/film/substrate'. Together they form a unique fingerprint.

Cite this