@inproceedings{d4bba31b319941028208e1c4db86f7c3,
title = "The effect of environmental conditions on designing of a photonic crystal force sensor",
abstract = "Microcantilever sensors have been widely used in designing force, strain and biochemical sensors. The fast-growing applications in nanoelectromechanical systems (NEMS) lead to strong demands to downsize the sensing elements to nanometer scale. In this paper, the detected environment on the performance of this photonic crystal sensor is investigated. The nanocavity, which can be used to localize the electromagnetic field in a low refractive index region, is a new sensing method to measure nano-scaled deformation. Through numerical simulation, we demonstrate that the range of the force sensor in each component force in X and Y directions are 0-1μN. In X direction, the minimum detectable applied forces are about 0.057μN and 0.070μN for the microcantilever operated in the water and air, respectively. And these in Y direction are 0.043μN and 0.053μN, respectively. Hence, it shows that a better resolution of applied force can be achieved in water than in air.",
keywords = "Microcantilever, Nanocavity, Photonic crystal, Sensor",
author = "Longqiu Li and Tianlong Li and Wenping Song and Guangyu Zhang and Yao Li",
year = "2014",
doi = "10.1117/12.2045235",
language = "英语",
isbn = "9780819499875",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
booktitle = "Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2014",
address = "美国",
note = "Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2014 ; Conference date: 10-03-2014 Through 13-03-2014",
}