Tetrahedral amorphous carbon films deposited by filtered cathodic vacuum arc technology

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	118
Number of pages	1
Journal	Gongneng Cailiao yu Qijian Xuebao/Journal of Functional Materials and Devices
Volume	9
Issue number	2
State	Published - Jun 2003

Cite this

@article{c62106b7594a44ee8f5734e8328f4831,

title = "Tetrahedral amorphous carbon films deposited by filtered cathodic vacuum arc technology",

author = "Han, \{Jie Cai\} and Zhu, \{Jia Qi\} and Meng, \{Song He\}",

year = "2003",

month = jun,

language = "英语",

volume = "9",

pages = "118",

journal = "Gongneng Cailiao yu Qijian Xuebao/Journal of Functional Materials and Devices",

issn = "1007-4252",

publisher = "Chinese Academy of Sciences",

number = "2",

}

TY - JOUR

T1 - Tetrahedral amorphous carbon films deposited by filtered cathodic vacuum arc technology

AU - Han, Jie Cai

AU - Zhu, Jia Qi

AU - Meng, Song He

PY - 2003/6

Y1 - 2003/6

UR - https://www.scopus.com/pages/publications/0038781034

M3 - 文章

AN - SCOPUS:0038781034

SN - 1007-4252

VL - 9

SP - 118

JO - Gongneng Cailiao yu Qijian Xuebao/Journal of Functional Materials and Devices

JF - Gongneng Cailiao yu Qijian Xuebao/Journal of Functional Materials and Devices

IS - 2

ER -