Temperature measurement and control of the micro- and nano- scale measurement environment

Among the methods to construction an environment temperature with a high stability and uniformity, vacuum manner and air-conditioning manner are the two major ways for the micro- and nano- scale measurement. The decoupling control methods are discussed for the system with multi-heat sources. Considering the complexity and non-precision of the air thermal control model, partly decouple method, which relies on the experience, is still an important method for the system with multi-heat sources. In general, a high-precision low temperature measurement can be realized by a platinum resistance temperature sensor (PRTS) with the high accuracy. But due to air natural convection, the self-heating effectiveness of PRTS should be considered. Hence, the quartz and thermocouple may be considered to measure the temperature under the micro and nano- scale measurement environment.