@inproceedings{f0ec6a15a57d4682a4dd083ec5c67c1e,
title = "Temperature effect of vapor-phase self-assembled monolayer for anti-sticking layers used in UV-embossing",
abstract = "An optimizing method of vapor-phase depositing anti-adherence layer in UV-embossing through controlling temperature is proposed to enhance the quality of demolding process. Experimental results show that, under low deposited temperature, the quality of anti-adherence layer is better than that under high temperature. Under low temperature, the contact angle of water, methylene iodide, and formamide is 119°, 101°, and 105°, and surface free energy is 8.5mJ/m2, which is similar to its ideal value. Film thickness is equal to its molecule length. XPS experiments mean that monolayer under low temperature is more orderly than that under high temperature. And crack character of low temperature is also better than that of high temperature.",
keywords = "UV-embossing, anti-sticking, s, temperature",
author = "Nan Liu and Lining Sun and Peng Jin and Jie Lin and Jiubin Tan",
year = "2013",
doi = "10.1109/3M-NANO.2013.6737449",
language = "英语",
isbn = "9781479912131",
series = "2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2013 - Conference Proceedings",
publisher = "IEEE Computer Society",
pages = "353--356",
booktitle = "2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2013 - Conference Proceedings",
address = "美国",
note = "2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2013 ; Conference date: 26-08-2013 Through 30-08-2013",
}