TY - GEN
T1 - Temperature control of microheaters for localized carbon nanotube synthesis
AU - Lu, Jingyu
AU - Xu, Ting
AU - Miao, Jianmin
PY - 2010
Y1 - 2010
N2 - A series of finite element thermoelectric coupling simulations on the Ti/Pt/Cr/Au thin film microheater array were conducted. The infrared image of the fabricated microheater device confirmed the simulation results. Based on these simulations, a microheater array was fabricated on Si/SiO2 substrate, and carbon nanotube bundles were grown locally at a temperature of above 650°C, while the temperatures in most ungrown area remain below 450°C, which is compatible with current IC process, facilitating the way for carbon nanotubes toward micro/nano electronics applications.
AB - A series of finite element thermoelectric coupling simulations on the Ti/Pt/Cr/Au thin film microheater array were conducted. The infrared image of the fabricated microheater device confirmed the simulation results. Based on these simulations, a microheater array was fabricated on Si/SiO2 substrate, and carbon nanotube bundles were grown locally at a temperature of above 650°C, while the temperatures in most ungrown area remain below 450°C, which is compatible with current IC process, facilitating the way for carbon nanotubes toward micro/nano electronics applications.
UR - https://www.scopus.com/pages/publications/77951659252
U2 - 10.1109/INEC.2010.5424544
DO - 10.1109/INEC.2010.5424544
M3 - 会议稿件
AN - SCOPUS:77951659252
SN - 9781424435449
T3 - INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings
SP - 91
EP - 92
BT - INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings
T2 - 2010 3rd International Nanoelectronics Conference, INEC 2010
Y2 - 3 January 2010 through 8 January 2010
ER -