Synthesis and characterization of B-C-N compounds on molybdenum

Jie Yu; E. G. Wang; Guichang Xu

doi:10.1557/JMR.1999.0150

Synthesis and characterization of B-C-N compounds on molybdenum

Jie Yu
, E. G. Wang^*
, Guichang Xu

^*Corresponding author for this work

CAS - Institute of Physics

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

Abstract

B-C-N compounds were prepared on molybdenum by means of bias-assisted hot filament chemical vapor deposition (HFCVD). Effect of the substrate temperature (T_s) on the growth of B-C-N films has been investigated systematically by x-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM) based on the detailed analysis and calculation of the XPS. The substrate temperature plays a key role in the formation of the bonding states, the composition, and the surface morphology. Boron carbonitride is the main phase at all depositing temperatures, and the obtained compounds are as follows: B_0.83C_0.17 + B_0.39C_0.35N_0.26 at 873 K, B_0.30C_0.34N_0.36 at 973 K, B_0.64C_0.36 + B_0.51C_0.23N_0.26 at 1073 K, B_0.51C_0.31N_0.18 at 1173 K, and B_0.37C_0.54N_0.09 at 1273 K.

Original language	English
Pages (from-to)	1137-1141
Number of pages	5
Journal	Journal of Materials Research
Volume	14
Issue number	3
DOIs	https://doi.org/10.1557/JMR.1999.0150
State	Published - Mar 1999
Externally published	Yes

Access to Document

10.1557/JMR.1999.0150

Cite this

@article{9f99263ebfcb495f8c53a6bbe8d6701a,

title = "Synthesis and characterization of B-C-N compounds on molybdenum",

abstract = "B-C-N compounds were prepared on molybdenum by means of bias-assisted hot filament chemical vapor deposition (HFCVD). Effect of the substrate temperature (Ts) on the growth of B-C-N films has been investigated systematically by x-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM) based on the detailed analysis and calculation of the XPS. The substrate temperature plays a key role in the formation of the bonding states, the composition, and the surface morphology. Boron carbonitride is the main phase at all depositing temperatures, and the obtained compounds are as follows: B0.83C0.17 + B0.39C0.35N0.26 at 873 K, B0.30C0.34N0.36 at 973 K, B0.64C0.36 + B0.51C0.23N0.26 at 1073 K, B0.51C0.31N0.18 at 1173 K, and B0.37C0.54N0.09 at 1273 K.",

author = "Jie Yu and Wang, \{E. G.\} and Guichang Xu",

year = "1999",

month = mar,

doi = "10.1557/JMR.1999.0150",

language = "英语",

volume = "14",

pages = "1137--1141",

journal = "Journal of Materials Research",

issn = "0884-2914",

publisher = "Springer International Publishing AG",

number = "3",

}

TY - JOUR

T1 - Synthesis and characterization of B-C-N compounds on molybdenum

AU - Yu, Jie

AU - Wang, E. G.

AU - Xu, Guichang

PY - 1999/3

Y1 - 1999/3

N2 - B-C-N compounds were prepared on molybdenum by means of bias-assisted hot filament chemical vapor deposition (HFCVD). Effect of the substrate temperature (Ts) on the growth of B-C-N films has been investigated systematically by x-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM) based on the detailed analysis and calculation of the XPS. The substrate temperature plays a key role in the formation of the bonding states, the composition, and the surface morphology. Boron carbonitride is the main phase at all depositing temperatures, and the obtained compounds are as follows: B0.83C0.17 + B0.39C0.35N0.26 at 873 K, B0.30C0.34N0.36 at 973 K, B0.64C0.36 + B0.51C0.23N0.26 at 1073 K, B0.51C0.31N0.18 at 1173 K, and B0.37C0.54N0.09 at 1273 K.

AB - B-C-N compounds were prepared on molybdenum by means of bias-assisted hot filament chemical vapor deposition (HFCVD). Effect of the substrate temperature (Ts) on the growth of B-C-N films has been investigated systematically by x-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM) based on the detailed analysis and calculation of the XPS. The substrate temperature plays a key role in the formation of the bonding states, the composition, and the surface morphology. Boron carbonitride is the main phase at all depositing temperatures, and the obtained compounds are as follows: B0.83C0.17 + B0.39C0.35N0.26 at 873 K, B0.30C0.34N0.36 at 973 K, B0.64C0.36 + B0.51C0.23N0.26 at 1073 K, B0.51C0.31N0.18 at 1173 K, and B0.37C0.54N0.09 at 1273 K.

UR - https://www.scopus.com/pages/publications/0033096728

U2 - 10.1557/JMR.1999.0150

DO - 10.1557/JMR.1999.0150

M3 - 文章

AN - SCOPUS:0033096728

SN - 0884-2914

VL - 14

SP - 1137

EP - 1141

JO - Journal of Materials Research

JF - Journal of Materials Research

IS - 3

ER -

Synthesis and characterization of B-C-N compounds on molybdenum

Abstract

Access to Document

Other files and links

Fingerprint

Cite this