Synthesis and ceramic conversion of polysiloxazane to silicon oxynitride

J. B. Zhang; T. Q. Lei; G. W. Wen; Y. Zhou

Synthesis and ceramic conversion of polysiloxazane to silicon oxynitride

J. B. Zhang^*
, T. Q. Lei
, G. W. Wen
, Y. Zhou

^*Corresponding author for this work

School of Materials Science and Engineering

Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

Amorphous silicon oxynitride powders have been obtained by the pyrolysis of polysiloxazane in a stream of anhydrous NH₃ at the temperature up to 1000°C. The polysiloxazane is fabricated from the ammonolysis of chloropolysiloxane that is produced by the hydrolysis of silicon tetrachloride. The conversion of polysiloxazane to silicon oxynitride and the structural features of the final powders have also been studied by infrared spectra, elemental composition, X-ray diffraction analysis and SEM observation.

Original language	English
Pages (from-to)	3-4
Number of pages	2
Journal	Journal of Materials Science and Technology
Volume	17
Issue number	1
State	Published - Jan 2001

Cite this

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title = "Synthesis and ceramic conversion of polysiloxazane to silicon oxynitride",

abstract = "Amorphous silicon oxynitride powders have been obtained by the pyrolysis of polysiloxazane in a stream of anhydrous NH3 at the temperature up to 1000°C. The polysiloxazane is fabricated from the ammonolysis of chloropolysiloxane that is produced by the hydrolysis of silicon tetrachloride. The conversion of polysiloxazane to silicon oxynitride and the structural features of the final powders have also been studied by infrared spectra, elemental composition, X-ray diffraction analysis and SEM observation.",

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year = "2001",

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AU - Zhang, J. B.

AU - Lei, T. Q.

AU - Wen, G. W.

AU - Zhou, Y.

PY - 2001/1

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N2 - Amorphous silicon oxynitride powders have been obtained by the pyrolysis of polysiloxazane in a stream of anhydrous NH3 at the temperature up to 1000°C. The polysiloxazane is fabricated from the ammonolysis of chloropolysiloxane that is produced by the hydrolysis of silicon tetrachloride. The conversion of polysiloxazane to silicon oxynitride and the structural features of the final powders have also been studied by infrared spectra, elemental composition, X-ray diffraction analysis and SEM observation.

AB - Amorphous silicon oxynitride powders have been obtained by the pyrolysis of polysiloxazane in a stream of anhydrous NH3 at the temperature up to 1000°C. The polysiloxazane is fabricated from the ammonolysis of chloropolysiloxane that is produced by the hydrolysis of silicon tetrachloride. The conversion of polysiloxazane to silicon oxynitride and the structural features of the final powders have also been studied by infrared spectra, elemental composition, X-ray diffraction analysis and SEM observation.

UR - https://www.scopus.com/pages/publications/0034779228

M3 - 文章

AN - SCOPUS:0034779228

SN - 1005-0302

VL - 17

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JO - Journal of Materials Science and Technology

JF - Journal of Materials Science and Technology

IS - 1

ER -

Synthesis and ceramic conversion of polysiloxazane to silicon oxynitride

Abstract

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