@inproceedings{39f443c6d852483a857785cc158ce060,
title = "Surface roughness of microfabrication and its influence on integrated interconnect transmission loss",
abstract = "Here, the disparity in metal surface roughness and its impact on loss is investigated for the integrated interconnection of optoelectronic devices fabricated by wafer-level multilayer metal-air-dielectric additive-manufacturing technology. The metal surface roughness and its influence on integrated interconnect transmission loss was analyzed. According to the different contact materials and post-treatment technique, a variety of metal surface models were established. The metal surface roughness of the fabricated samples was measured, and the influence of the micro-machining process was verified. Meanwhile, micro-coaxial transmission lines are employed as the research object to validate the mechanism of surface roughness affecting transmission loss. The measured results of the transmission line samples are well consistent with the finite element simulation results by considering the actual metal roughness.",
keywords = "metal surface roughness, micro-coaxial lines, microfabrication, transmission loss",
author = "Yang Liu and Shengying Zou and Xuyao Zhang and Bin Liu and Jie Lin and Peng Jin",
note = "Publisher Copyright: {\textcopyright} 2024 SPIE.; 3rd International Conference on Advanced Manufacturing Technology and Manufacturing Systems, ICAMTMS 2024 ; Conference date: 24-05-2024 Through 26-05-2024",
year = "2024",
doi = "10.1117/12.3038258",
language = "英语",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Ke Zhang and Dailin Zhang",
booktitle = "Third International Conference on Advanced Manufacturing Technology and Manufacturing Systems, ICAMTMS 2024",
address = "美国",
}