Abstract
The s p3 -bonded carbon/SiC composite films have been produced from electron beam-physical vapor deposition of SiC materials. The hardness of such films, measured using Hysitron indentation, reaches 50 GPa, which is significantly higher than the hardness of SiC (28 GPa). It appears that the superhardness of the thin films is due to the formation of nanocrystalline SiC/diamondlike carbon composites.
| Original language | English |
|---|---|
| Article number | 241914 |
| Journal | Applied Physics Letters |
| Volume | 91 |
| Issue number | 24 |
| DOIs | |
| State | Published - 2007 |
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