Surface effects of atmospheric pressure plasma jet in removing organic contamination from gratings

Atmospheric pressure plasma jet can generate highly activated and low-temperature plasma in open space. It has significant application value for in-situ removal of organic contaminations on grating surfaces in intense laser devices. However, there is currently limited research on atmospheric pressure plasma jet cleaning of organic contaminations on the surface of optical components, and the cleaning effect is difficult to predict and quantify. Therefore, this study designed an orthogonal experiment, employing the grating surface’s contact angle and surface energy as evaluation criteria, to conduct both qualitative and quantitative analyses of the cleaning effectiveness. Afterward, we established a mathematical regression model between cleaning parameters and cleaning effectiveness to verify the significance of different parameters. The research results indicate that the plasma jet can effectively remove organic contaminations, and the cleaning effect improves with the decrease in cleaning distance and the increase in cleaning time and oxygen ratio. Based on the constructed mathematical regression model, the cleaning effect can be predicted according to cleaning parameters. The results can provide new methods and a practical basis for in-situ removal of organic contamination on grating surfaces in intense laser devices.