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Study on the surface micro topography of cryogenic polished ceramic glass

Research output: Contribution to journalArticlepeer-review

Abstract

The internal micro structure of ceramic glass, the crystalline phase and glass phase of its composition and the measurement for the crystalline size are revealed. Besides that, the surface topography and the micro surface flaw of the ultraprecision cryogenic polished ceramic glass are especially analyzed.

Original languageEnglish
Pages (from-to)87-90
Number of pages4
JournalJixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering
Volume38
Issue number1
DOIs
StatePublished - Jan 2002

Keywords

  • Ceramic glass
  • Crystalline phase
  • Glass phase
  • Polishing
  • Surface roughness
  • Surface topography

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