TY - GEN
T1 - Study on micromachine tools in fabrication of microparts
AU - Yingchun, Liang
AU - Yan, Zhao
AU - Qingshun, Bai
AU - Shumei, Wang
AU - Bo, Wang
AU - Mingjun, Chen
AU - Jianhua, Dou
PY - 2006
Y1 - 2006
N2 - The development of Mechanical Micromanufacturing Technology-micromachine tools, as an alternative method for the fabrication of miniature products, is illustrated in this paper. Its advantages over MEMS and conventional large-scale ultraprecision machine tools is the ability to produce micro parts, composed of various of nonsilicon materials, with real 3D complex shapes or free-form surface, and meanwhile consume little energy, space and resources. The focus is on the discussions of the processing tests and frameworks of the micro eqiupments developed in Japan, Korea, UK and USA. Especially, two micromachine tools (300 mm × 150 mm × 165 mm and 300 mm × 300 mm × 290 mm) developed in Harbin Institute of Technology are introduced. It also points out the trends towards the investigation on micromachine tools such as holding microcomponents, optimizing machining variables and monitoring micro tools.
AB - The development of Mechanical Micromanufacturing Technology-micromachine tools, as an alternative method for the fabrication of miniature products, is illustrated in this paper. Its advantages over MEMS and conventional large-scale ultraprecision machine tools is the ability to produce micro parts, composed of various of nonsilicon materials, with real 3D complex shapes or free-form surface, and meanwhile consume little energy, space and resources. The focus is on the discussions of the processing tests and frameworks of the micro eqiupments developed in Japan, Korea, UK and USA. Especially, two micromachine tools (300 mm × 150 mm × 165 mm and 300 mm × 300 mm × 290 mm) developed in Harbin Institute of Technology are introduced. It also points out the trends towards the investigation on micromachine tools such as holding microcomponents, optimizing machining variables and monitoring micro tools.
KW - Micromachine tool
KW - Micromanufacturing
KW - Micropart
UR - https://www.scopus.com/pages/publications/46149116341
U2 - 10.1109/NEMS.2006.334911
DO - 10.1109/NEMS.2006.334911
M3 - 会议稿件
AN - SCOPUS:46149116341
SN - 1424401402
SN - 9781424401406
T3 - Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
SP - 856
EP - 859
BT - Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
T2 - 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
Y2 - 18 January 2006 through 21 January 2006
ER -