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Study on micro electrical discharge deposition in air

  • Zhen Long Wang*
  • , Jing Zhi Cui
  • , Bai Dong Jin
  • *Corresponding author for this work
  • Harbin Institute of Technology

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The formation mechanism of micro three-dimensional spiral structure is discussed. Simulations of deposition ions trace in deposition process, which is the key of forming micro three-dimensional spiral structure, are performed. It is found that the deposition ions trace is of a helix shape. The simulation results correspond well with the deposit structure obtained in the test. It is found from the simulation results that the distribution of electromagnetic field in discharge channel has a considerable influence on the deposition structure and movement of deposited particles.

Original languageEnglish
Title of host publicationProceedings of the 2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007
Pages63-68
Number of pages6
DOIs
StatePublished - 2007
Event2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007 - Harbin, China
Duration: 5 Aug 20078 Aug 2007

Publication series

NameProceedings of the 2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007

Conference

Conference2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007
Country/TerritoryChina
CityHarbin
Period5/08/078/08/07

Keywords

  • Discharge channel
  • Electrical discharge deposition
  • PIC method

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