Study on key techniques of micro-EDM equipments

The micro-EDM (electrical discharge machining) equipments with three linked axes are developed. The key technique and realization approach of micro-EDM using the equipment are also discussed. The micro-energy pulse power source satisfied with versatile demands is designed by the analysis of the realization approach. To solve the crawl problem of servo mechanism at small feed, a suitable control strategy is applied in the equipment. The microelectrode on-line fabrication and measure are studied and the error of on-line measure is also discussed. The micro-shaft with minimum diameter 12 μm and the micro-hole with minimum diameter 25 μm can be machined stably through lots of experiments on the equipment. And a micro-facial sculpture with free space curved surface and size 1 mm × 0.3 mm × 0.18 mm is also machined successfully.