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Study on effects of the feed on AFM-based nanomachining process

  • Yongda Yan*
  • , Tao Sun
  • , Shen Dong
  • *Corresponding author for this work
  • Harbin Institute of Technology

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Effects of the scratching feed on machined surface and scratching forces are studied by using AFM-based nanomachining process scratching along the long axis of the cantilever. Results show: A deeper structure and rougher surface can be obtained at a smaller feed. An increase in the feed results in increases in scratching forces and the resultant force and a decrease in the normal force. Finally, all forces reach to a saturation value. The ratio of the cutting force to the thrust force in the plane perpendicular to the cutting edge can reveal effects of ploughing and cutting between the tip and the sample in the nanomachining process. Correspondingly, different states (cutting or ploughing) play a key role in formation of the machined surface at different feeds.

Original languageEnglish
Title of host publicationAdvances in Materials Manufacturing Science and Technology II - Selected Papers from the 12th International Manufacturing Conference in China
EditorsChengyu Jiang, Geng Liu, Dinghua Zhang, Xipeng Xu
PublisherTrans Tech Publications Ltd
Pages257-260
Number of pages4
ISBN (Print)0878494219, 9780878494217
DOIs
StatePublished - 2006
Event12th International Manufacturing Conference in China, IMCC2006 - Xi'an, China
Duration: 21 Sep 200623 Sep 2006

Publication series

NameMaterials Science Forum
Volume532-533
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752

Conference

Conference12th International Manufacturing Conference in China, IMCC2006
Country/TerritoryChina
CityXi'an
Period21/09/0623/09/06

Keywords

  • AFM
  • Diamond tip
  • Nanomachining
  • Scratching forces

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