Abstract
The forces acting on the cathodic arc spot were tentatively modeled to understand the mechanism and motion of the spot as the arc is ignited at a side of the disk-shaped target and moves to the top surface of the target in vacuum arc deposition. Various factors affecting the motion of the spot were qualitatively discussed. it was found that the motion of the graphite cathodic arc spot can be considerably accelerated by optimizing the side geometry of a disk-shaped cathode.
| Original language | English |
|---|---|
| Pages (from-to) | 416-420 |
| Number of pages | 5 |
| Journal | Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology |
| Volume | 19 |
| Issue number | 6 |
| State | Published - Nov 1999 |
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