@inproceedings{dfd93de294734ff4a03ebd230c1d42de,
title = "Study on atmospheric pressure plasma processing in contact mode",
abstract = "The previous designed plasma jet has an obvious drawback of low material removal efficiency during the atmospheric pressure plasma processing (APPP). To solve this problem, a plasma generator which can work in both contact mode and remote mode is developed. And the influences of both modes on the fused silica material processing are investigated. The experiment results show that under the same conditions, the material removal efficiency in contact mode is approximately 1∼3 times higher than that in remote mode. This is mainly attributed to the more adequate chemical reaction between the excited atoms and workpiece surface in contact mode.",
author = "N. Li and B. Wang and Jin, \{H. L.\}",
year = "2012",
language = "英语",
series = "Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012",
publisher = "euspen",
pages = "493--496",
editor = "H. Spaan and Theresa Burke and Paul Shore",
booktitle = "Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012",
note = "12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012 ; Conference date: 04-06-2012 Through 07-06-2012",
}